Airborne molecular contamination






Monitoring of semiconductor
photolithography process and cleanroom
environment
Monitoring of photomask/photoresist
manufacturing process and environment
Monitoring of display manufacturing process and
environment
Precision control appropriate for the fields of
biotechnology, military monitoring and control
of odors

Ultra-high sensitivity
High reliability and stability
Extensive measurement range
Fast and automatic measurement
Convenient and remote controllable

 

Airborne molecular contamination

Monitoring Gas NH©ý
Detection Range 0.1~200 ppbv
Limit of Detection 0.10 ppbv

Sensitivity

0.05 ppbv

Operational Condition

5~40¡É, 0~70%

Precision

 ¡¾3% (F.S)

Detection Time

10 minutes / sample (Option 8 or 5 min)

Sampling Ports

12 (or 24) ports

Communication

RS-232C , TCP/IP

Size

955(W)¡¿615(D)¡¿1729(H)

Power

220(or 110) V, 60 Hz, 10 A



Withtech l portable gas analyzer l airborne molecular contamination l ammonia gas detector l clean room contamination l gas analyzer
Molecular Contamination Monitoring System l Monitoring of water contamination l Metallic Contamination Monitoring System l PPT Level Analysis l sitemap