Ammonia gas detector





Monitoring of semiconductor manufacturing process and cleanroom environment
Monitoring of gas discharge environment for
semiconductor process
Monitoring of photomask and photoresist process
and environment
Monitoring of display manufacturing process and
environment
Measurement of halogenated environmental
hormone substances

High resolution and high sensitivity
Extensive detection range
Measurement of halogenated ions
Fast, automatic measurement
High level of reliability and stability
Simultaneous measurement of multiple
substances (6 Ions)
Convenient remote controllable operation and
management

 

 Ammonia gas detector

Monitoring Ion F-, Cl-, NO2-, Br-, NO3-, and SO42-
Detection Range

(F- ; 0.3 ppbv, Cl- ; 0.2 ppbv, Others; 0.1 ppbv)
Limit of Detection 0.10 ppbv

Sensitivity

0.05 ppbv

Operational Condition

5~40¡É, 0~70%

Precision

 ¡¾3% (F.S)

Detection Time

20 minutes / sample

Sampling Ports

12 (or 24) ports

Communication

RS-232C , TCP/IP

Size

955(W)¡¿615(D)¡¿1729(H)

Power

220(or 110) V, 60 Hz, 10 A



Withtech l portable gas analyzer l airborne molecular contamination l ammonia gas detector l clean room contamination l gas analyzer
 Molecular Contamination Monitoring System l Monitoring of water contamination l Metallic Contamination Monitoring System l PPT Level Analysis l sitemap