
A patent awarded in Feb. 2005 (Patent No. 0475644)
-> High Performance Ammonia Gas Collecting Method & Monitoring System
Two patents pending in 2006
One patent pending in 2007

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| Sponsor |
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Project Name |
|
Period |
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SMBA |
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A development of various strong acid gas monitoring technology in display and semiconducts |
|
Apr. 1, 2005- Mar. 31, 2007 (successed) |
|
SMBA |
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A development of highly sensitivive and fast monitoring technology for the contamination of photolithograph process in semiconductor. |
|
Apr. 1, 2004- Mar. 31, 2005 (successed) |
|
KIEST |
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A development of portable instrument to measure of hazardous compounds in air using mass spectrometry |
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June 1, 2004-May 31, 2005 (successed) |
|
|

Development of high precision automatic solution supplier system
Development of easy movable acid gases monitoring system
Development of presicion metallic contamination monitoring system
Development of a measuring system of TOC (Total Organic Contamination) in air
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